蚀刻后抛光划痕的再现和明显增大的原因

------金相样品的腐蚀环节有时候会“放大”划痕效果，甚至变得更为恶劣

抛光的时候（注：指抛光结束后）基本没划痕，腐蚀后，出现大量划痕，怎么回事？这是划痕数量明显增加的现象。有的回帖指出：

Peterflyer：一方面有可能是由于铜很软，在磨削抛光试样时划痕会因铜表面受力而发生表面剪切塑性变形，凹坑处被邻近变形的金属覆盖，但在覆盖的金属被腐蚀掉后，原来的划痕就会显示出来了；另一方面也可能是由于表面磨削抛光中不同点处受到的应力以及由此导致的应变不同，因此其耐腐蚀性也不同，当受腐蚀时，容易被腐蚀的地方先被腐蚀掉，从而在显微镜下原来光滑的表面上显示出一道道划痕。[4]

这看起来，国内对于磨抛理论的认识还是处于一个“新旧交替”的过渡期。大家的认识只是一个可能性的罗列，并没有一个“内化深入”的过程。也看不到“实验数据”。

而萨默尔斯鸠不同了，一切以实验数据说话。一切，源于“损伤层”的深度、宽度。

    The mechanical aspects of the polishing mechanism has been shown by Aghan and Samuels to be relevant to all polishing abrasives regardless of their size [36]. However, there are some polishing situations where the liquid suspension or an etchant added to the slurry contribute significantly to the polishing action, producing greater metal removal. Samuels concluded that the abrasive acts to wipe away protective films that form on the surface and referred to this action as a "wiping-chemical polishing" mechanism [3]. Polishing produces plastically deformed surface layers, similar to those produced by grinding, but the depths are much lower [3]. As in grinding, the deformation is not uniform but is concentrated under the scratches and is responsible for the reappearance and apparent enlargement of polishing scratches after etching.（来自：George Vander Voort乔治.范德.沃特的著述）

    Aghan和Samuels已经证明抛光机理的机械方面与所有抛光磨料无关，无论其尺寸如何[36]。然而，存在一些抛光情况，其中添加到浆料中的液体悬浮液或蚀刻剂显着地有助于抛光作用，产生更大的金属去除。萨缪尔斯得出结论，研磨剂可以擦除表面上形成的保护膜，并称之为“擦拭 - 化学抛光”机制[3]。抛光产生塑性变形的表面层，类似于通过研磨产生的那些，但深度要低得多[3]。在研磨中，变形不均匀，但在划痕下集中，并且是蚀刻后抛光划痕的再现和明显增大的原因。

    3. Samuels, L. E.: Metallographic Polishing by Mechanical Methods, 2d ed., American Elsevier Publishing Company, Inc., New York, 1971; 3d ed., American Society for Metals, Metals Park, Ohio, 1982.

参考资料：

[1]  https://www.sciencedirect.com/science/article/abs/pii/004316487090253X  Mechanisms of abrasive polishing

Wear  Volume 16, Issue 4, October 1970, Pages 293-301  R.L. Aghan  L.E. Samuels

Abstract：Direct evidence is obtained, using the scanning electron microscope, that fine abrasive polishing operations can occur by a mechanical mechanism in which very small chips are cut. The difference between polishing and abrasion in this respect is only one of degree. Evidence is presented to show how the abrasive particles are held so that they may act as planing tools, and the resultant complexity of the factors likely to affect polishing rate is discussed. Some consideration is also given to other possible mechanisms of polishing.

摘要：利用扫描电子显微镜获得直接证据，即通过切割非常小的切屑的机械机构可以进行精细研磨抛光操作。在这方面，抛光和磨损之间的差异只是程度之一。提供的证据表明磨料颗粒是如何被保持的，以便它们可以作为刨削工具，并且讨论了可能影响抛光速率的因素的复杂性。还考虑了其他可能的抛光机制。

[2]  https://web.mit.edu/cmp/publications/thesis/jiunyulai/ch3.pdf  CHAPTER 3 MECHANISMS OF MATERIAL REMOVAL IN THE CMP PROCESS

[3]  https://www.sciencedirect.com/science/article/pii/S0043164804004582  Influence of the polishing process on the near-surface zone of hardened and unhardened steel  by F.Klocke O.Dambon G.G. CapudiFilho

Wear  Volume 258, Issues 11–12, June 2005, Pages 1794-1803

Abstract：Interface phenomena on polishing are still not completely understood. On this account, ground hardened and unhardened workpieces of CrMo-steel were polished with diamond suspension in order to analyze the process. Using the synchro-speed kinematic for spherical lenses, a step-by-step polishing process was executed. After each polishing step, the surface topography of the workpieces was analyzed by both a light-microscope and a white light interferometer to determine the roughness. At the end of the process, transmission electron microscopy （TEM） analyses were made to visualize changes in the near-surface zone. The microstructures of the boundary layer and of the subsurface have been characterized and effects such as plastic deformation, flow of material and nanostructure formation, have been discussed. The results obtained for the hardened material were compared with those obtained for the unhardened. Based on the analyses made, it was possible to conclude that plastic deformation of the near-surface zone takes place in a higher degree when the unhardened steel is polished. It has been stated that material removal and surface quality improvement are both determined by the mechanical properties of the near-surface zone, which differ from those of the bulk material.

摘要：抛光界面现象尚不完全清楚。因此，使用金刚石悬浮液对经过硬化和未硬化的CrMo钢工件进行抛光，以分析该过程。使用球同透镜的同步速度运动学，执行逐步抛光过程。在每个抛光步骤之后，通过光学显微镜和白光干涉仪分析工件的表面形貌以确定粗糙度。在该过程结束时，进行透射电子显微镜（TEM）分析以显现近表面区域的变化。已经表征了边界层和地下的微观结构，并讨论了塑性变形，材料流动和纳米结构形成等效应。将得到的硬化材料的结果与未硬化的材料的结果进行比较。根据所做的分析，可以得出结论，当未硬化的钢被抛光时，近表面区域的塑性变形发生在更高的程度。已经指出，材料去除和表面质量改善都由近表面区域的机械性能决定，其与散装材料的机械性能不同。

[4]  http://muchong.com/html/201704/11261116.html  用三氯化铁腐蚀纯铜，抛光的时候基本没划痕，腐蚀后出现大量划痕，怎么回事？  作者 西工大大大大  来源: 小木虫

    用三氯化铁腐蚀纯铜，抛光的时候基本没划痕，腐蚀后出现大量划痕，怎么回事？