应力双折射测量的原理

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杂谈 |
The Splitting of a light beam into
two perpendicular polarization components, which travel at different velocities
through a material.
nIntrinsic
birefringence(内在双折射)
qDifference in refractive indices in
crystals and polymers
q晶体和聚合物不同的折射率。
nResidual
birefringence(残余双折射)
qInhomogeneity of refractive index
from residual strain formed during production
q在产品生产过程产生的残余应力形成了不均匀的折射率。
Anisotropic material:
nx ≠ ny
n各项异性材料:nx ≠ ny
nPhase difference fast axis vs. slow
axis
n快轴与慢轴之间有相位差
nCharacterized by
表征
q retardation magnitude
(nm)
延迟(nm)
q fast axis angle
(degrees)
快轴角度(°)
q¼ Wave System – For measuring the
lowest retardation levels and the highest
precision.
q¼波长系统:测量最低水平的延迟,提供最高精度
½ Wave System – For measuring at
higher retardation levels and for high speed data
collection.
q½波长系统:测量较高水平延迟,高速数据采集
Hinds Exicor
生产线最初是为支持光刻行业研发低水平双折射光学元件而开发建立的
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